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We demonstrate a 60 nm gate length substrate-strained Si CMOS technology and the fastest reported ring oscillator speed of 6.5 ps at 1.2 V operation. The largest enhancement (15%) in I/sub on/-I/sub off/ characteristics without correction for self-heating effects is also reported. The substrate-strained Si process is optimized to enhance manufacturability and circumvent difficulties associated with the integration of the strained Si/SiGe heterostructure. We also report a phenomenon responsible for increased the off state leakage in strained Si devices and a way to suppress it. Surmounting key integration challenges faced by the Si/SiGe heterostructure is critical for its introduction as a manufacturable process.