Skip to Main Content
IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards,
eBooks, and eLearning courses.
Learn more about:
IEEE Xplore subscriptions
In this paper, the resist is evaporated using conventional thermal evaporation. Thickness as small as 20 nm have been demonstrated, with surface roughness as small as 4 nm rms.
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.© Copyright 2016 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.