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Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter

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4 Author(s)
Hatakeyama, Y. ; Dept. of Phys., Yokohama Nat. Univ., Japan ; Hanai, T. ; Suzuki, S. ; Kokubun, Y.

To eliminate the scattering loss at the crossing points of cross grid busline waveguides, a multilevel crossing structure of busline waveguide was introduced into the vertically coupled microring resonator filter. The top surface of each buried waveguide was perfectly planarized by a new fabrication process and clear filter responses were observed for a single ring and a series coupled double ring resonator with multilevel crossing busline waveguides.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 2 )

Date of Publication:

Feb. 2004

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