By Topic

Influence of metastable atoms in radio-frequency argon discharges

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Roberto, M. ; Dept. de Fisica, Inst. Tecnologico de Aeronaut.a, Sao Jose Dos Campos, Brazil ; Smith, H.B. ; Verboncoeur, J.P.

A planar one-dimensional (1-D) particle-in-cell (PIC) simulation with Monte Carlo collisions (MCC) has been used to study the effect of including metastable argon on the characteristics of a 13.56-MHz argon discharge. Reactions such as metastable creation, ionization from the metastable state, metastable quenching to resonant level, and metastable pooling were taken into account. At low pressure (0.05 torr), metastables were found to have little influence on the discharge. However, at a pressure of 1 torr, ionization from the metastable state and collisions between two metastables represent a significant percentage of the total ionization rate, strongly influencing the electron heating and the discharge potential. The effect of pressure and applied voltage on the discharge parameters is studied and a comparison between discharges with and without metastables is presented. A PIC-MCC simulation was compared to the fluid model of Lymberopoulos and Economu (1993) using their published parameters, showing that using PIC simulation the main process of metastable loss is metastable pooling.

Published in:

Plasma Science, IEEE Transactions on  (Volume:31 ,  Issue: 6 )