Referenced Items are not available for this document.
The Gamma function is proposed to approximate the measured lithographic defect size distribution for the estimation of the chip critical area. It is shown that, compared to the commonly used 1/x3 function for approximation of the lithographic defect size distribution, the Gamma function provides much better agreement with the measured data, thus leading to a more accurate estimation of the chip critical area.
Published in:
Electronics Letters
(Volume:28
,
Issue:
6
)
Date of Publication: 12 March 1992
- Page(s):
- 528 - 530
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 4138522
- Digital Object Identifier :
- 10.1049/el:19920333
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- 12 March 1992
- Sponsored by :
- Institution of Engineering and Technology
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