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We demonstrate the use of jitter-free ultrafast rise-time electrical pulses generated by a semiconductor photoconductive switch with femtosecond laser illumination to study the fast polarization switching process in fully integrated, ferroelectric PNZT thin-film capacitors. The necessary conditions for high-speed polarization switching detection are presented. The switching behavior for various sizes of capacitors and various rise-times of applied voltage pulses are investigated. Circuit influence on the activation field, α, as well as application of the Inshibashi-Merz model, are discussed.