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Extraction of material parameters in film bulk acoustic resonator (FBAR) using genetic algorithm

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4 Author(s)
Jeongheum Lee ; Graduate Sch. of Hanyang Univ., Seoul, South Korea ; Jaeyong Jung ; Jong-Il Park ; Hyeongdong Kim

The extraction of material parameters from the given (or measured) input impedance of film bulk acoustic resonators (FBARs) using a genetic algorithm (GA) is proposed. After studying the effect of material parameter changes on impedance responses, resonance characteristics of FBARs are used to extract the material parameters. The extracted result agrees very well with the given material parameters.

Published in:

Electron Device Letters, IEEE  (Volume:25 ,  Issue: 2 )