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Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

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7 Author(s)
Fuchs, D.T. ; Lucent Technol. Bell Labs., Murray Hill, NJ, USA ; Chan, H.B. ; Stuart, H.R. ; Baumann, F.
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A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 μs.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 2 )