By Topic

Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $33
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
D. T. Fuchs ; Lucent Technol. Bell Labs., Murray Hill, NJ, USA ; H. B. Chan ; H. R. Stuart ; F. Baumann
more authors

A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 μs.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 2 )