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Thermal distribution during destructive pulses in ESD protection devices using a single-shot two-dimensional interferometric method

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9 Author(s)
D. Pogany ; Inst. for Solid State Electron., Vienna Univ. of Technol., Austria ; S. Bychikhin ; J. Kuzmik ; V. Dubec
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Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a two-dimensional holographic interferometry technique. The hot spot dynamics and the position of destructive current filaments is correlated with the thermal distribution under the nondestructive conditions and with the failure analysis results.

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IEEE Transactions on Device and Materials Reliability  (Volume:3 ,  Issue: 4 )