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The prediction of stiction failures in MEMS

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3 Author(s)
van Spengen, W.M. ; IMEC, Leuven, Belgium ; Puers, R. ; De Wolf, I.

The surface interaction energy of sticking surfaces has been the subject of considerable modeling and can be experimentally investigated. Much less is currently known about the influence that a certain surface interaction energy (distribution) has on the reliability of MEMS devices. The only treatises to date are purely "black box" statistical methods. In this paper, we discuss a comprehensive model that describes many stiction failure situations. For the first time, the surface interaction properties are linked directly to a reliability function.

Published in:

Device and Materials Reliability, IEEE Transactions on  (Volume:3 ,  Issue: 4 )

Date of Publication:

Dec. 2003

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