Referenced Items are not available for this document.
Radio frequency microelectromechanical systems (RF MEMS) capacitive switches using amorphous diamond (a-D) as a novel dielectric with controlled leakage have been successfully developed. The devices show a unipolar switching response to a unipolar stimulus, indicating the absence of significant dielectric charging. These initial devices exhibit a down-state capacitance of 2.6 pF and a predicted static power dissipation of 10 nW. This technology is promising for the development of reliable, low-power RF MEMS switches.
Published in:
Electronics Letters
(Volume:40
,
Issue:
1
)
Date of Publication: 8 Jan. 2004
- Page(s):
- 43 - 44
- ISSN :
- 0013-5194
- INSPEC Accession Number:
- 7826637
- Digital Object Identifier :
- 10.1049/el:20040034
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 21 January 2004
- Issue Date :
- 8 Jan. 2004
- Sponsored by :
- Institution of Engineering and Technology
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