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A full wave method is presented for modeling and analyzing multiple interactions among vertical vias in densely packaged integrated circuits and printed circuit board with ground plane of finite extent. In such structures, the TEM mode in the planar structure is excited and can propagate and cause interaction of waves among vias. Reflections will also occur at the edges of the finite ground plane. The electromagnetic analysis methodology is an extension of the previous methodology in analyzing multiple scattering among vias for infinite ground plane . The analysis is based upon the cylindrical wave mode expansion of the magnetic field Green's function, the Foldy-Lax multiple scattering formalism and utilizing the resonator modes of a circular cavity. The circular resonator modes are transformed into cylindrical waves onto the cylindrical via structures. Numerical results illustrate the physics of the underlying resonance scattering problems. We consider the cases of a) two coupled active vias of differential mode and b) two coupled vias of common mode. Results are also illustrated for ground plane resonance and the effects of shorting vias on such resonance. The effects of off-centering and the presence of idle vias are also illustrated.