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MOEMS tuning element for a Littrow external cavity laser

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2 Author(s)
R. R. A. Syms ; Dept. of Electr. & Electron. Eng., Imperial Coll. London, UK ; A. Lohmann

A miniature grating-tunable external cavity laser diode constructed using microoptoelectromechanical systems (MOEMS) technology is described. The tuning element is a vertically etched blazed grating mounted on a compound flexure, which consists of a cantilever in series with a portal frame. The flexure is deflected using comb electrostatic drives to rotate and translate the grating. The tuning element is prototyped using deep reactive ion etching of bonded silicon-on-insulator (SOI) material. Interferometric measurements of electromechanical performance are presented, and departures from the ideal behavior are identified. Electrostatic tuning of a Littrow external cavity laser over a range of 20 nm using a 50-V drive is demonstrated.

Published in:

Journal of Microelectromechanical Systems  (Volume:12 ,  Issue: 6 )