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Piezoelectric bimorph microphone built on micromachined parylene diaphragm

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2 Author(s)
Meng-Nian Niu ; Dept. of Electr. Eng., Univ. of Hawaii, Honolulu, HI, USA ; Eun Sok Kim

This paper describes a novel bimorph piezoelectric microphone built on a micromachined parylene diaphragm with two ZnO films of opposite c-axis orientations. Both the sensitivity and signal-to-noise ratio (SNR) of the bimorph parylene-diaphragm microphone have been demonstrated to be much higher than those of a conventional unimorph silicon-nitride-diaphragm microphone.

Published in:

Microelectromechanical Systems, Journal of  (Volume:12 ,  Issue: 6 )