Referenced Items are not available for this document.
This paper describes a novel bimorph piezoelectric microphone built on a micromachined parylene diaphragm with two ZnO films of opposite c-axis orientations. Both the sensitivity and signal-to-noise ratio (SNR) of the bimorph parylene-diaphragm microphone have been demonstrated to be much higher than those of a conventional unimorph silicon-nitride-diaphragm microphone.
Published in:
Microelectromechanical Systems, Journal of
(Volume:12
,
Issue:
6
)
Date of Publication: Dec. 2003
- Page(s):
- 892 - 898
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 7830341
- Digital Object Identifier :
- 10.1109/JMEMS.2003.820288
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 January 2004
- Issue Date :
- Dec. 2003
- Sponsored by :
- IEEE Electron Devices Society
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