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A micro-hotplate-based monolithic CMOS thermal analysis system

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5 Author(s)
Barrettino, D. ; Phys. Electron. Lab., ETH Zurich, Switzerland ; Song, W.H. ; Graf, M. ; Hierlemann, A.
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A novel monolithic differential thermal analyzer fabricated in industrial CMOS-technology combined with post-CMOS micromachining is presented, which includes three micro-hotplates and all necessary driving and signal conditioning circuitry. Three on-chip proportional temperature controllers (one controller per micro-hotplate), regulate the micro-hotplate temperature up to 350/spl deg/C with a steady-state error of less than 1% of the preset micro-hotplate temperature. A circular micro-hotplate design was developed to improve the hotplate power efficiency. The thermal analysis performance was assessed by melting point measurements of ammonium nitrate (melting point at 169.6/spl deg/C).

Published in:

Solid-State Circuits Conference, 2003. ESSCIRC '03. Proceedings of the 29th European

Date of Conference:

16-18 Sept. 2003