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DNA electrical detection based on inductor resonance frequency in standard CMOS technology

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7 Author(s)
Laurent, G. ; Lab. de Microelectronique, Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium ; Hagelsieb, L.M. ; Lederer, D. ; Lobert, P.E.
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Several electrical methods have been studied for the detection of DNA hybridization on silicon chips, using capacitance or resistance changes of micro-arrays of electrode fingers. In this work, we studied the possibility of detecting DNA by the measurement of the resonance frequency shift of an inductor designed on Si substrate. Self-resonance frequency shift as large as 10 GHz before and after DNA hybridization has been measured for inductors made from standard CMOS process. with a protective oxide coating and a DNA amplification based on silver enhancement.

Published in:

European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on

Date of Conference:

16-18 Sept. 2003