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GaAs MMIC design using basic elements library

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3 Author(s)
Krutov, A.V. ; 'Istok' Fed. State-Owned Unitary Res. & Production Enterprise, Moscow, Russia ; Rebrov, A.S. ; Temnov, A.M.

In this report the issues related to the design of microwave monolithic and hybrid-monolithic integrated circuits using the library of basic elements are considered. The MMIC production technique is shown which provides for the generation of active and passive circuit elements with a electronic microscope dimensional processing at resolutions below 0.25/spl mu/m and with a 1/spl mu/m photolithographic processing. The structure of the library of basic elements is shown, which includes metal and mesa-resistors, metal-insulator-metal capacitors, inductors, air bridges, plated holes, and field effect transistors. The topological standards for the base elements are integrated into the production cycle. The design of a monolithic low noise amplifier and a hybrid-monolithic amplifier is shown.

Published in:

Microwave and Telecommunication Technology, 2003. CriMiCo 2003. 13th International Crimean Conference

Date of Conference:

8-12 Sept. 2003

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