By Topic

Multistate latching MEMS variable optical attenuator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Syms, R.R.A. ; Opt. & Semicond. Devices Group, Imperial Coll. London, UK ; Zou, H. ; Stagg, J. ; Moore, D.F.

A multistate latching variable optical attenuator (VOA) is demonstrated using microelectromechanical systems (MEMS) technology. The mechanism is used to fix the position of a shutter inserted into the optical path between two single-mode fibers. The mechanism and fiber mounts are fabricated in 85 μm thick silicon using bonded silicon-on-insulator material, by deep reactive ion etching. The device can be continuously adjusted or latched into a discrete set of attenuation states using a rack-and-tooth mechanism driven by electrothermal shape bimorph actuators. Electromechanical and optical characterization is performed to demonstrate a latching VOA function, with a maximum attenuation of 30 dB.

Published in:

Photonics Technology Letters, IEEE  (Volume:16 ,  Issue: 1 )