Cart (Loading....) | Create Account
Close category search window
 

Sputtered FeCoN soft magnetic thin films with high resistivity

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Hai Jiang ; Western Digital Corp., Fremont, CA, USA ; Yingjian Chen ; Guoda Lian

Fe70Co30N thin films with thickness from 20 to 1100 Å were prepared by radio- frequency reactive sputtering in an N2--Ar mixture. The FeCoN films prepared in a low nitrogen flow rate percentage (<6%) and sputtering pressure (<8 mTorr) have a high Bs of about 24.0 kG, but a moderate hard-axis coercivity Hch of 5-30 Oe. With further increase in N2 percentage or sputtering pressure, films become significantly softer, with Hch of about 0.1-0.6 Oe, and have a higher resistivity of up to about 160 μΩ·cm. The change in the magnetic properties with nitrogen flow rate percentage and sputtering pressure can be attributed to the formation of an ultrafine grain size nanocrystalline FeCoN thin film as observed by high-resolution transmission electron microscope. The soft properties of FeCoN films with nano-sized crystallites remain stable even after being annealed at 270°C.

Published in:

Magnetics, IEEE Transactions on  (Volume:39 ,  Issue: 6 )

Date of Publication:

Nov. 2003

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.