Referenced Items are not available for this document.
In this work we propose the Ru metal gate for a lanthanide oxide gate insulator and show satisfactory electrical properties of Ru/La oxide stack MOSFETs.
Published in:
Gate Insulator, 2003. IWGI 2003. Extended Abstracts of International Workshop on
Date of Conference: 6-7 Nov. 2003
- Page(s):
- 90 - 93
- Print ISBN:
- 4-89114-037-2
- INSPEC Accession Number:
- 7971480
- Conference Location :
- Toyko, Japan
- Digital Object Identifier :
- 10.1109/IWGI.2003.159191
- Product Type:
- Conference Publications
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