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Study of membrane supported RF MEMS resistive switches using electromagnetical simulation

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6 Author(s)
Vladoianu, F. ; Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania ; Vasilache, D. ; Enachescu, R. ; Dragan, I.
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We present a wide band analysis of two types of resistive switches: series and parallel. In order to improve the RF parameters we have reduced the thickness of the substrate and placed the switches on different types of membranes.

Published in:

Semiconductor Conference, 2003. CAS 2003. International  (Volume:2 )

Date of Conference:

28 Sept.-2 Oct. 2003

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