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Data acquisition and processing for semiconductor devices

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5 Author(s)
Agache, P. ; Politehnic Inst. of Bucharest, Romania ; Boianceanu, C. ; Draghlci, F. ; Dilimot, G.
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This paper describes an automated system for the data acquisition and processing for semiconductor devices. The paper has two distinctive parts: the software implementation and the experimental results. The realized system exhibits a remarkable flexibility thanks to the modular architecture.

Published in:

Semiconductor Conference, 2003. CAS 2003. International  (Volume:2 )

Date of Conference:

28 Sept.-2 Oct. 2003