Referenced Items are not available for this document.
A new design for a piezo-resistive accelerometer made by Si bulk micro-machining is proposed. The enhancements applied by the authors especially in design and also in processing and control techniques lead to a more precise device, having a superior reliability. After a FEA simulation by ANSIS, showing the benefits of this new design, it follows a brief description of the layout control elements and finally the processing enhancements applied to give a 1g piezo-resistive accelerometer.
Published in:
Semiconductor Conference, 2003. CAS 2003. International
(Volume:1
)
Date of Conference: 28 Sept.-2 Oct. 2003
- Print ISBN:
- 0-7803-7821-0
- INSPEC Accession Number:
- 7847254
- Digital Object Identifier :
- 10.1109/SMICND.2003.1251378
- Product Type:
- Conference Publications
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