Skip to Main Content
A new design for a piezo-resistive accelerometer made by Si bulk micro-machining is proposed. The enhancements applied by the authors especially in design and also in processing and control techniques lead to a more precise device, having a superior reliability. After a FEA simulation by ANSIS, showing the benefits of this new design, it follows a brief description of the layout control elements and finally the processing enhancements applied to give a 1g piezo-resistive accelerometer.
Semiconductor Conference, 2003. CAS 2003. International (Volume:1 )
Date of Conference: 28 Sept.-2 Oct. 2003