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An analytical model for calculating the reflection and transmission coefficients of a Bragg reflector with periodic structure is reported. Using explicit expressions for these coefficients the reflectivity of the periodic structures was simulated for different pairs of layer materials (SiO2/Si3N4.poly-Si/SiO2, Si/air-gap and SiO2/Au) and layer thickness. Our method allows the rapid evaluation of reflectance of Bragg reflector with periodic structure.
Semiconductor Conference, 2003. CAS 2003. International (Volume:1 )
Date of Conference: 28 Sept.-2 Oct. 2003