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2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676)

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The following topics were discussed: nanoscience and nanoengineering; micromachined devices and circuits for microwave and millimeter wave applications; microoptics and microphotonics sensors and MEMS.

Published in:

Semiconductor Conference, 2003. CAS 2003. International  (Volume:1 )

Date of Conference:

Sept. 28 2003-Oct. 2 2003