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The response of a microwave multipolar bucket plasma to a high voltage pulse

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5 Author(s)
Qin, Shu ; Dept. of Electr. & Comput. Eng., Northeastern Univ., Boston, MA, USA ; Chan, Chung ; McGruer, Nicol E. ; Browning, J.
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A collisional model that describes the response of a microwave multipolar bucket plasma to a high voltage pulse is developed for plasma source ion implantation (PSII). The primary purpose is to develop a theoretical model of PSII plasma physics to be used in conjunction with a model of ion-target interaction to optimize PSII processing. Measurements of the sheath position and target current in a 100 mtorr helium plasma are found to be consistent with the model. Sheath thicknesses predicted by the collisional model are significantly less than those predicted by similar noncollisional models

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Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 6 )