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Physics and applications of charged particle beam sources

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2 Author(s)
Hamilton, G.W. ; Lab. du CNRS, Ecole Polytech., Palaiseau, France ; Bacal, Marthe

The authors review the physics and a few applications of charged particle beam sources, most of which originate from, propagate through, or use as a target, a partially ionized plasma. The authors present the plasma phenomena and plasma conditions which are general to most of the charged particle sources, but also other approaches and the current status of the research. The authors describe the applications of charged particle beam sources using partially ionized plasmas in accelerators and ion implantation. The applications covered are those of accelerator sources and ion implantation

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Plasma Science, IEEE Transactions on  (Volume:19 ,  Issue: 6 )