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Determination of frequency dependent transmission line parameters on product related on chip test line structures using S-parameter measurements

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6 Author(s)
Winkel, T.-M. ; IBM Entwicklungs GmbH, Boblingen, Germany ; Ktata, M.F. ; Ludwig, T. ; Schettler, H.
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The frequency dependent propagation constant, characteristic impedance as well as the R, L, C and G parameters are determined from on chip S-parameter measurements. The transmission line test structures are embedded in a multi layer test chip. Measurement limitations due to a non ideal chip environment are shown and discussed. Measured and simulated results show a very good agreement.

Published in:

Electrical Performance of Electronic Packaging, 2003

Date of Conference:

27-29 Oct. 2003