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Wireless micro-machine with magnetic thin film

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7 Author(s)

As the magnetic micro-machines are driven by a magnetic field, they require no power supply cables, no batteries, and no controlling systems on the machine body. We fabricated the spiral-type micro-machine (outer diameter; 0.14 mm, length; 1.0 mm) by a tungsten wire (Φ 20 μm). NdFeB film magnet was deposited on the spiral-machine by the PLD method. In the experiment, the wireless micro-machine swam at the speed of 0.2 ∼ 1.6 mm/s. This result indicated that the spiral shape was suitable for miniature swimming machine.

Published in:

Micromechatronics and Human Science, 2003. MHS 2003. Proceedings of 2003 International Symposium on

Date of Conference:

19-22 Oct. 2003