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A 1.8 V ΔΣ modulator, fabricated in a 0.18 μm standard digital CMOS process, achieves 81 dB SFDR and 74 dB SNR over a 3 MS/s conversion bandwidth. Its single-loop single-feedback architecture uses a 3rd-order FIR noise-transfer- function and a 5 bit quantizer to render the quantization noise negligible at 16× oversampling. A pseudo data-weighted-averaging technique linearizes the multibit feedback D/A converter, while eliminating the inband signal-dependent tones. The bootstrapped switches in the switched-capacitor implementation reduce the sampling distortion for a 1.85 Vpp input-signal range. The analog and digital power consumptions are 32.4 mW and 12.6 mW, respectively. The on-chip references dissipate 14.4 mW.