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Nonlinear servo control of MEMS mirrors and their performance in a large port-count optical switch

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24 Author(s)
I. Brener ; Tellium, Oceanport, NJ, USA ; P. Chu ; M. Tsai ; C. Pu
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We demonstrate full closed-loop control of electrostatically actuated double-gimbaled MEMS mirrors and use them in a free space optical cross-connect with switching times of less than 10 ms, and optical power stability of better than 0.2 dB.

Published in:

Optical Fiber Communications Conference, 2003. OFC 2003

Date of Conference:

23-28 March 2003