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A surface and bulk micromachined angular vertical combdrive for scanning micromirrors

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5 Author(s)
W. Piyawattanametha ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; P. Patterson ; M. Wu ; D. Hah
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We present a high performance scanning micromirror with angular vertical comb actuators realized by combining MUMPs with a 3-mask deep-reactive-ion-etching post process. A DC scan angle of ±4° (mechanical) is achieved at 40 V.

Published in:

Optical Fiber Communications Conference, 2003. OFC 2003

Date of Conference:

23-28 March 2003