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A hybridised, multi-channel, charged-particle detecting and counting array

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4 Author(s)
Hatfield, J.V. ; Univ. of Manchester Inst. of Sci. & Technol., UK ; Comer, J ; York, T.A. ; Hicks, P.J.

A hybrid circuit is reported which is a novel position-sensitive charged-particle detector. Multiple-anode integrated detectors (MAIDs) have been developed which consist of an array of electron sensing anodes and a corresponding array of amplifiers and counters all integrated on a single chip. The anodes are fabricated on the surface of the chip over a thick dielectric film. The active anode array can be arbitrarily extended by abutting individual MAIDs side-by-side, under the control of a customizing master ULA. When mounted with a microchannel plate multiplier, the device counts individual particles or photons

Published in:

Custom Integrated Circuits Conference, 1990., Proceedings of the IEEE 1990

Date of Conference:

13-16 May 1990