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Hybrid integration of semiconductor lasers with Si-based single-mode ridge waveguides

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5 Author(s)
Friedrich, E.E.L. ; Swedish Inst. of Microelectron. Kista, Sweden ; Oberg, M.G. ; Broberg, Bjorn ; Nilsson, S.
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Hybridization is a convenient way for providing silicon-based integrated optical circuits with a laser source. An entirely passive alignment technique exclusively based on the high precision obtainable by lithography and by semiconductor processes was examined. A novel way of cleaving the laser chips by self-aligned cleaving grooves was employed. It resulted in 15.5-dB coupling losses between the laser diode and the single-mode buried ridge waveguide

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Lightwave Technology, Journal of  (Volume:10 ,  Issue: 3 )