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High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 /spl mu/m, the actuator was designed with a cantilever length of 300 /spl mu/m to 1000 /spl mu/m. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)and capacitance-voltage C(V)-measurements were carried out.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:50 , Issue: 10 )
Date of Publication: Oct. 2003