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Riding the relational power wave to enhance the command, control & prompt reduction of monitoring wafer usage

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5 Author(s)
Ang Chee Teck ; Manuf. Dept., Semicond. Manuf. Int. Corp., Shanghai, China ; Ko Chen Pin ; Teo, K. ; Huang, F.
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The paper presents a method (named as the "Power" Concept) which quantifies the controlling & management of the necessary but relentingly high Monitor Wafer usages in the Wafer Fab. The objective is effective & prompt wafer usage reduction without losing the command and control of the wafers quantity & quality. This approach establishes the understanding & quantification on the impact of each well-intentioned input action taken. Quantifications are achieved by 'adding direction' to the Input Power(P), and thus riding and tapping on this Power(P) & not be overwhelmed by the problems of uncontrolled Power(P). Quantifiable anticipated results are the characteristics of this approach.

Published in:

Semiconductor Manufacturing, 2003 IEEE International Symposium on

Date of Conference:

30 Sept.-2 Oct. 2003

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