By Topic

Real time scheduler for wafer foundry fab with Object-oriented Petri nets

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

This paper presents the scheme of a multiple-objective real-time scheduler for semiconductor wafer fab using Colored Timed Object-oriented Petri nets (CTOPN). First, a high-fidelity hierarchical CTOPN model of the wafer fab is constructed, upon which a hierarchical control system is also formed. To rank WIP lots in meeting multiple scheduling objectives, a combined priority index is then developed in the fab level controller. To cope with unpredictable events occurred on the equipments, such as breakdown, real-time dispatching policies are encapsulated in the work station-level controllers, which dynamically dispatch wafer lost, and the dispatching results are fed back to fab controller through work area controllers.

Published in:

Semiconductor Manufacturing, 2003 IEEE International Symposium on

Date of Conference:

30 Sept.-2 Oct. 2003