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High speed AMHS and its operation method for 300 mm QTAT-fab

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5 Author(s)
Watanabe, S. ; Trecenti Technol. Inc., Hitachinaka, Japan ; Wakabayashi, T. ; Kobayashi, Y. ; Okabe, T.
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By using all-single-wafer processing in the 300 mm QTAT production system, we have shortened cycle time to 1/2 or less compared with mixed-batch processing. We have also developed a high-speed AMHS for realizing a short cycle time. An intra-bay RGV developed for the 300 mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. Trecenti Technologies realized a transfer time of 1/3 or less that of previous fabs.

Published in:

Semiconductor Manufacturing, 2003 IEEE International Symposium on

Date of Conference:

30 Sept.-2 Oct. 2003