Cart (Loading....) | Create Account
Close category search window
 

High speed AMHS and its operation method for 300 mm QTAT-fab

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Watanabe, S. ; Trecenti Technol. Inc., Hitachinaka, Japan ; Wakabayashi, T. ; Kobayashi, Y. ; Okabe, T.
more authors

By using all-single-wafer processing in the 300 mm QTAT production system, we have shortened cycle time to 1/2 or less compared with mixed-batch processing. We have also developed a high-speed AMHS for realizing a short cycle time. An intra-bay RGV developed for the 300 mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. Trecenti Technologies realized a transfer time of 1/3 or less that of previous fabs.

Published in:

Semiconductor Manufacturing, 2003 IEEE International Symposium on

Date of Conference:

30 Sept.-2 Oct. 2003

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.