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Application of hydrogenated water to united water supply system for high performance and step-by-step investment type system LSI manufacturing fab

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4 Author(s)
Yokoi, I. ; Kurita Water Ind. Ltd., Tochigi, Japan ; Yamazaki, Y. ; Sugawa, S. ; Ohmi, T.

This study was carried on to contribute the application of hydrogenated water to future water supply system. It shows that using hydrogenated water can perfectly control flowing out from surface for all pipe line materials, so that its application enables cooling water system to unite with ultrapure water (UPW) system for a high performance and step-by-step investment type system LSI manufacturing fab (HPSI-fab) preventing metal contamination in the pipe. It reveals that energy consumption and space for the system are reduced by 20% and 45% respectively compared with a current system. It can achieve initial and running cost reduction and ESH (Environment, Safety and Health) promotion in HPSI-fab.

Published in:

Semiconductor Manufacturing, 2003 IEEE International Symposium on

Date of Conference:

30 Sept.-2 Oct. 2003