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IC-integrated flexible shear-stress sensor skin

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4 Author(s)
Yong Xu ; Dept. of Electr. & Comput. Eng., Wayne State Univ. Detroit, MI, USA ; Yu-Chong Tai ; A. Huang ; Chih-Ming Ho

This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress sensor skin. The sensor skin is 1 cm wide, 2 cm long, and 70 μm thick. It contains 16 shear-stress sensors, which are arranged in a 1-D array, with on-skin sensor bias, signal-conditioning, and multiplexing circuitry. We further demonstrated the application of the sensor skin by packaging it on a semicylindrical aluminum block and testing it in a subsonic wind tunnel. In our experiment, the sensor skin has successfully identified both the leading-edge flow separation and stagnation points with the on-skin circuitry. The integration of IC with MEMS sensor skin has significantly simplified implementation procedures and improved system reliability.

Published in:

Journal of Microelectromechanical Systems  (Volume:12 ,  Issue: 5 )