By Topic

Optical and membrane modelling in a MEMS hyperspectral imaging system

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
6 Author(s)
Wehner, J.G.A. ; Western Australia Univ., Nedlands, WA, Australia ; Martyniuk, M. ; Antoszewski, J. ; Musca, C.A.
more authors

Hyperspectral imaging using micro-electro-mechanical systems (MEMS) is investigated. A Fabry-Perot cavity is created using a silicon nitride membrane suspended over a variable length air gap, to support a distributed Bragg reflector. Models of membrane behaviour and reflector optical performance are given.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002