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InP- and InGaAs- capped single In0.53Ga0.47As/InP quantum wells were implanted with 20 keV and 1 MeV P ions at 200 °C. Blueshifts in the quantum well emissions after annealing were studied as a function of implant dose. Rutherford backscattering channeling spectrometry studies were used to monitor the damage created in the near surface region of the samples. The observed energy shifts have been correlated with damage accumulation and defect migration behaviour in both systems.