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Metallo-organic decomposition derived Sr0.95Ca0.05ZrO3 oxide thin films on Pt/Ti/SiO2/Si substrate

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6 Author(s)
Changhong Chen ; Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore ; Weiguang Zhu ; Ting Yu ; Xiaofeng Chen
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Dielectric thin films of strontium zirconate doped with 5 mol% calcium were prepared on Pt/Ti/SiO2/Si substrate by the metallo-organic decomposition (MOD) wet chemical technology followed by annealing at different temperatures in flowing oxygen atmosphere. Those prepared Sr0.95Ca0.05ZrO3 thin films were investigated using differential thermal analysis (DTA) and thermogravimetric analysis (TGA), X-ray diffraction (XRD), UV optical reflection spectroscopic measurement, and sweeping frequency dependence of the dielectric constants and losses to study their structural development, optical band gaps, and dielectric properties. The study is aimed at seeking a possibility for an application in the area of high-K dielectrics.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002