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Portable MEMS power sources

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1 Author(s)
Schmidt, M.A. ; Microsystems Technol. Lab., MIT, Cambridge, MA, USA

Two devices are described that realize MEMS-based power sources as alternatives to batteries. The first is thermoelectric which utilizes a SiGe thermopile on a silicon nitride membrane. The device generates power at 500/spl deg/C. The second device is an engine that consists of a high-speed rotating silicon turbine.

Published in:

Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International

Date of Conference:

13-13 Feb. 2003