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This paper presents an analysis of the cavity length modulation of a Z-cut quartz etalon for laser diode wavelength stabilization. The electrooptic effect, piezoelectric effect, photoelastic effect, and a mechanical circuit of the etalon were considered. Approximate equations that allow clear physical interpretation of the mechanical force, mechanical resonance frequency, and Q factor of the mechanical resonance were obtained. We also compared analysis and experimental results, and show that most of the experimental values were in accord with the calculated values.