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Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology

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2 Author(s)
Choo, H. ; Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA ; Muller, R.S.

High-precision microlenses with excellent optical characteristics is described. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. This hybrid method enables researchers to define the locations and diameters of microlenses with ±1 μm precision as well as to control the curvatures of the microlenses accurately.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003