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Biaxial MEMS raster scanner with linear ramp drive

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2 Author(s)
Urey, H. ; KOC Univ., Istanbul, Turkey ; Sprague, R.

A biaxial MEMS raster scanner is developed for laser scanning displays. We discuss microfabrication, packaging, and design aspects, and how to minimize power consumption and linearity error by optimizing the vertical scanner resonant frequency and drive waveform.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003