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Two-axis scanning mirror for free-space optical communication between UAVs

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5 Author(s)
Lixia Zhou ; Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA ; Last, M. ; Milanovic, V. ; Kahn, J.M.
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We have developed a SOI/SOI wafer bonding process to design and fabricate two-axis scanning mirrors with excellent performance. These mirrors are used to steer laser beams in free-space optical communication between UAVs.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003