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Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring

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7 Author(s)
Sawada, Renshi ; NTT Microsystem Integration Labs., NTT Corp., Kanagawa, Japan ; Yamaguchi, J. ; Higurashi, E. ; Shimizu, A.
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This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003